Resonantly driven piezoelectric micropump Fabrication of a micropump having high power density

Mechatronics

Volumn 9, Issue 7, 1999, Pages 687-702

  Park, Jung Ho ^a   Yoshida, Kazuhiro ^a   Yokota, Shinichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Fluid power; High viscosity; Micromachine; Micropump; Power density; Resonance drive

Indexed keywords

EID: 0001555349     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0957-4158(99)00028-8     Document Type: Article

References (5)

1. Proceedings of the 10th IEEE MEMS Workshop, 1997.
2. Tatsue Y. J the Robotics Society of Japan 1994;12(4):508-13 (in Japanese).
3. Yoshida K, Yokota S. Proc. FLOMEKO'93, 1993. 1. p. 122-130.
4. Yoshida K, Takahashi K, Yokota S. Proc. Third Int. Conf. Advanced Mechatronics (ICAM'98), 1998. 1. p. 306-311.
5. Park JH, Yoshida K, Yokota S. Proc. ASME IMECE'97, 1997. FPST (4). p. 77-82.