Determination of layer structure in Mo/Si multilayers using soft X-ray reflectivity

Physica B: Condensed Matter

Volumn 325, Issue , 2003, Pages 272-280

  Modi, M H ^a   Lodha, G S ^a   Nayak, M ^a   Sinha, A K ^a   Nandedkar, R V ^a  

^a RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

Interdiffusion; Multilayer; Soft X ray; Synchrotron radiation; X ray reflectivity

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); MOLYBDENUM; REFLECTION; SILICON; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; X RAY ANALYSIS;

X-RAY REFLECTIVITY;

MULTILAYERS;

EID: 0037212204     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(02)01539-9     Document Type: Article

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