Capping layers for extreme-ultraviolet multilayer interference coatings

Optics Letters

Volumn 26, Issue 5, 2001, Pages 259-261

  Singh, Mandeep ^a   Braat, Joseph J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; LIGHT ABSORPTION; LIGHT INTERFERENCE; LIGHT REFLECTION; MOLYBDENUM; NUMERICAL METHODS; OPTICAL COATINGS; OPTICAL FILMS; SILICON CARBIDE; THIN FILMS;

CAPPING LAYERS;

OPTICAL MULTILAYERS;

EID: 0001144452     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.000259     Document Type: Article

References (8)

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