메뉴 건너뛰기




Volumn 26, Issue 5, 2001, Pages 259-261

Capping layers for extreme-ultraviolet multilayer interference coatings

Author keywords

[No Author keywords available]

Indexed keywords

CAPPING LAYERS;

EID: 0001144452     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.000259     Document Type: Article
Times cited : (25)

References (8)
  • 6
    • 0004055759 scopus 로고
    • SPIE, Bellingham, Wash., Chap. 8
    • E. Spiller, Soft X-Ray Optics (SPIE, Bellingham, Wash., 1994), Chap. 8.
    • (1994) Soft X-Ray Optics
    • Spiller, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.