![]() |
Volumn 26, Issue 5, 2001, Pages 259-261
|
Capping layers for extreme-ultraviolet multilayer interference coatings
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CAPPING LAYERS;
IMAGING TECHNIQUES;
LIGHT ABSORPTION;
LIGHT INTERFERENCE;
LIGHT REFLECTION;
MOLYBDENUM;
NUMERICAL METHODS;
OPTICAL COATINGS;
OPTICAL FILMS;
SILICON CARBIDE;
THIN FILMS;
OPTICAL MULTILAYERS;
|
EID: 0001144452
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.26.000259 Document Type: Article |
Times cited : (25)
|
References (8)
|