Electron beam deposition system for X-ray multilayer mirrors

Bulletin of Materials Science

Volumn 19, Issue 6, 1996, Pages 1109-1116

  Lodha, G S ^a   Nandedkar, R V ^a   Varma, A D U ^a  

^a RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

Electron beam evaporation; Thin films; Ultra high vacuum; X ray multilayer; Xuv optics

Indexed keywords

ELECTRON BEAMS; EVAPORATION; MULTILAYERS; THIN FILMS; VAPOR DEPOSITION; X RAYS;

ELECTRON BEAM DEPOSITION;

MIRRORS;

EID: 0030350295     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02744645     Document Type: Article

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