Adhesion criterion for center-anchored circular plates in microstructures

Sensors and Actuators, A: Physical

Volumn 101, Issue 1-2, 2002, Pages 14-23

  Lin, Meng Ju ^a   Chen, Rongshun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Adhesion criterion; Capillary force; Catastrophe theory; Center anchored circular plate; MEMS; Sticking effect

Indexed keywords

ADHESION; MECHANICAL PROPERTIES; MICROMACHINING; MICROSTRUCTURE; RESIDUAL STRESSES; SUBSTRATES;

ADHESION CRITERION; CAPILLARY FORCE; CATASTROPHE THEORY; CENTER ANCHORED CIRCULAR PLATE; SURFACE MICROMACHINING FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0037201879     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00150-4     Document Type: Article

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