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Volumn 24, Issue 4, 2001, Pages 645-649
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Sticking effect on center-anchored circular plates in microstructures
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Author keywords
Capillary force; Center anchored circular plate; Sticking effect; Surface tension
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Indexed keywords
CAPILLARY FORCES;
ELASTIC MODULI;
FABRICATION;
MICROMACHINING;
MICROSTRUCTURE;
POISSON DISTRIBUTION;
SUBSTRATES;
SURFACE TENSION;
ELECTRONICS PACKAGING;
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EID: 0035696843
PISSN: 15213331
EISSN: None
Source Type: Journal
DOI: 10.1109/6144.974955 Document Type: Article |
Times cited : (8)
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References (14)
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