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Volumn 24, Issue 4, 2001, Pages 645-649

Sticking effect on center-anchored circular plates in microstructures

Author keywords

Capillary force; Center anchored circular plate; Sticking effect; Surface tension

Indexed keywords

CAPILLARY FORCES;

EID: 0035696843     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/6144.974955     Document Type: Article
Times cited : (8)

References (14)
  • 11
    • 0027565299 scopus 로고
    • Mechanical stability and adhesion of microstructures under capillary forces - II: Experiments
    • (1993) J. Microelectromech. Syst. , vol.2 , Issue.1 , pp. 44-55


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.