Investigation on hydrogen annealing effect for various ferroelectric films by electrostatic force microscope

Applied Surface Science

Volumn 188, Issue 3-4, 2002, Pages 411-415

  Shin, S ^a   Pi, U H ^a   Kim, D J ^a   Kang, B S ^a   Noh, T W ^a   Khim, Z G ^a  

^a Seoul National University   (South Korea)

Author keywords

BLT; EFM; Ferroelectric film; Hydrogen forming gas annealing; PZT

Indexed keywords

ANNEALING; DEGRADATION; ELECTRIC RESISTANCE; ELECTROSTATICS; INTERDIFFUSION (SOLIDS); PASSIVATION; POLARIZATION; THIN FILMS;

ELECTROSTATIC FORCE MICROSCOPES (EFM);

FERROELECTRIC MATERIALS;

EID: 0037187245     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00959-X     Document Type: Conference Paper

References (19)