Structure and tribological properties of carbon nitride films obtained by the reactive ionized cluster beam method

Surface and Coatings Technology

Volumn 160, Issue 2-3, 2002, Pages 132-137

  Feng, J Y ^a   Xie, J Q ^a   Zou, X R ^a   Lu, H W ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Carbon nitride films; Reactive ionized cluster beam technique; Tribological properties

Indexed keywords

CARBON NITRIDE; CHEMICAL BONDS; DEPOSITION; IONIZATION; OPTIMIZATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNTHESIS (CHEMICAL);

CLUSTER BEAM METHOD;

THIN FILMS;

CARBON NITRIDE; FILM; TRIBOLOGY; WEAR PREVENTION;

EID: 0037159164     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00391-2     Document Type: Article

References (17)