Energy-filtered imaging in a field-emission scanning electron microscope for dopant mapping in semiconductors

Journal of Applied Physics

Volumn 92, Issue 12, 2002, Pages 7667-7671

  Schonjahn C ^a   Humphreys, C J ^a   Glick, M ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Marconi Labs Cambridge   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION DISPLAYS; IMAGING TECHNIQUES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS;

SECONDARY ELECTRONS;

ELECTRONS;

EID: 0037115579     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1525862     Document Type: Article

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