Diagnostic of rf discharge plasma by Thomson scattering with gated intensified charge coupled device detectors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 I, 2000, Pages 1395-1400

  Moshkalyov, S A ^a   Thompson, C ^a   Morrow, T ^a   Graham, W G ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHARGE COUPLED DEVICES; LIGHT SCATTERING; PHOTODETECTORS; SOLID STATE LASERS;

CAPACITIVELY COUPLED PLASMAS; INDUCTIVELY COUPLED PLASMAS (ICP); THOMSON SCATTERING; YTTRIUM ALUMINUM GARNET LASER;

PLASMA DIAGNOSTICS;

EID: 0034227944     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582361     Document Type: Article

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