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Volumn 65, Issue 16, 2002, Pages 1654361-1654369
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Lattice strain and static disorder in hydrogen-implanted and annealed single-crystal silicon as determined by large-angle convergent-beam electron diffraction
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Author keywords
[No Author keywords available]
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Indexed keywords
HYDROGEN;
SILICON;
ARTICLE;
ATOMIC PARTICLE;
CRYSTAL STRUCTURE;
ELECTRON DIFFRACTION;
LOW TEMPERATURE;
SURFACE PROPERTY;
TEMPERATURE DEPENDENCE;
TRANSMISSION ELECTRON MICROSCOPY;
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EID: 0037091445
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (7)
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References (22)
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