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Applied Surface Science

Volumn 137, Issue 1-3, 1999, Pages 113-124

Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces

(2) Okada, L A a George, S M a

a UNIVERSITY OF COLORADO (United States)

Author keywords

Adsorption; Desorption; TiN surfaces

Indexed keywords

ADSORPTION; AMINES; DESORPTION; LASER APPLICATIONS; REACTION KINETICS; SPUTTER DEPOSITION; SURFACE STRUCTURE;

DIMETHYLAMINE; LASER-INDUCED THERMAL DESORPTION; STICKING COEFFICIENTS; TETRAKISDIMETHYLAMINO TITANIUM;

TITANIUM NITRIDE;

EID: 0032805136 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00375-4 Document Type: Article

Times cited : (22)

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