Liquid-delivery metal-organic CVD of strontium bismuth tantalate thin films using Sr[Ta(OC2H5)5(OC2H4OCH 3)]2 and Bi(C6H5)3 precursors

Advanced Materials

Volumn 14, Issue 17, 2002, Pages 221-225+1184

  Shin, Woong Chul ^a   Choi, Kyu Jeong ^a   Seong, Nak Jin ^a   Choi, Eun Suck ^a   Kim, Byoung Hee ^a   Yoon, Soon Gil ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Ferroelectrics; Hysteresis loop; Liquid delivery MOCVD; Remanent polarization

Indexed keywords

ANNEALING; CRYSTALLIZATION; FERROELECTRICITY; HYSTERESIS; STOICHIOMETRY; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS;

REMANENT POLARIZATION;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0037015283     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)