SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 97-105

Phase modulated spectroscopic ellipsometry of dielectric multilayer beam combiner

(4) Bhattacharyya, D a Sahoo, N K a Thakur, S a Das, N C a

a BHABHA ATOMIC RESEARCH CENTRE (India)

Author keywords

Beam; Dielectric; Spectroscopic ellipsometry

Indexed keywords

ALGORITHMS; DIELECTRIC FILMS; ELLIPSOMETRY; MULTILAYERS; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS;

BEAM COMBINERS;

OPTICAL COATINGS;

EID: 0037009693 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00729-0 Document Type: Article

Times cited : (9)

References (45)

1
- 0011107597
- F.R. Flory (Ed.), Marcell Dekker Inc., NY, 1995, p. 1
- H.A. Macleod, in: F.R. Flory (Ed.), Marcell Dekker Inc., NY, 1995, p. 1.
- Macleod, H.A.¹

2
- 0017241347
- Pulker K.K., Paesold G., Ritter E. Appl. Opt. 15:1976;2986.
- (1976) Appl. Opt. , vol.15 , pp. 2986
- Pulker, K.K.¹ Paesold, G.² Ritter, E.³

3
- 0011104151
- Tokyo, Japan, 31 May-1 June
- T. Sakaguchi, M. Oshikiri, F. Koyama, K. Iga, Proceedings of the MRS International Meeting on Adv. Materials, Tokyo, Japan, 31 May-1 June 1988.
- (1988) Proceedings of the MRS International Meeting on Adv. Materials
- Sakaguchi, T.¹ Oshikiri, M.² Koyama, F.³ Iga, K.⁴

4
- 0011130373
- Kozhukharov V., Trapalios Ch., Samuneva B., Kilinova E. J. Mater. Sci. Lett. 11:1992;1206.
- (1992) J. Mater. Sci. Lett. , vol.11 , pp. 1206
- Kozhukharov, V.¹ Trapalios, Ch.² Samuneva, B.³ Kilinova, E.⁴

5
- 84975575097
- Taga Y., Itoh T. Appl. Opt. 28:1989;2690.
- (1989) Appl. Opt. , vol.28 , pp. 2690
- Taga, Y.¹ Itoh, T.²

6
- 0024608076
- Mitschke F., Ankerhold G., Lange W. Appl. Phys. B. 48:1989;101.
- (1989) Appl. Phys. B , vol.48 , pp. 101
- Mitschke, F.¹ Ankerhold, G.² Lange, W.³

7
- 0000470217
- Tan M., Lin Y., Zhao D. Appl. Opt. 36:1997;827.
- (1997) Appl. Opt. , vol.36 , pp. 827
- Tan, M.¹ Lin, Y.² Zhao, D.³

8
- 0031549391
- Kostlin H., Frank G., Hebbinghaus G., Auding H., Denissen K. J. Non-Cryst. Solid. 218:1997;347.
- (1997) J. Non-Cryst. Solid , vol.218 , pp. 347
- Kostlin, H.¹ Frank, G.² Hebbinghaus, G.³ Auding, H.⁴ Denissen, K.⁵

9
- 0011081385
- Birnie III D.P., Melpolder S.W., Fabes B.D., Zelinski B.J.J.J., Hanrahan M.J. Opt. Eng. 32:1993;2960.
- (1993) Opt. Eng. , vol.32 , pp. 2960
- Birnie D.P. III¹ Melpolder, S.W.² Fabes, B.D.³ Zelinski, B.J.J.J.⁴ Hanrahan, M.J.⁵

10
- 0000502880
- Frank M., Schallenberg U.B., Kaiser N. Opt. Eng. 36:1997;1220.
- (1997) Opt. Eng. , vol.36 , pp. 1220
- Frank, M.¹ Schallenberg, U.B.² Kaiser, N.³

11
- 0032686307
- Back J., Han W.S., Cho H.K., Lee B., Choi I.H. Electronics Lett. 35:1999;814.
- (1999) Electronics Lett. , vol.35 , pp. 814
- Back, J.¹ Han, W.S.² Cho, H.K.³ Lee, B.⁴ Choi, I.H.⁵

12
- 0027680901
- Amra C. Appl. Opt. 32:1993;5481.
- (1993) Appl. Opt. , vol.32 , pp. 5481
- Amra, C.¹

13
- 0028207797
- Nakayama T. J. Electrochem. Soc. 141:1994;237.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 237
- Nakayama, T.¹

14
- 0033170205
- Battaglin C., Caccavale F., Menelle A., Monetecchi M., Nichelatti E., Nicoletti F., Polato P. Thin Solid Films. 351:1999;176.
- (1999) Thin Solid Films , vol.351 , pp. 176
- Battaglin, C.¹ Caccavale, F.² Menelle, A.³ Monetecchi, M.⁴ Nichelatti, E.⁵ Nicoletti, F.⁶ Polato, P.⁷

15
- 0030565105
- Aslanoglou X., Asimakopoulos P.A., Trapalis C., Kordas G., Karakassides M.A., Pilakouta M. Nuclear Instr. Methods Phys. Res. B. 118:1996;630.
- (1996) Nuclear Instr. Methods Phys. Res. B , vol.118 , pp. 630
- Aslanoglou, X.¹ Asimakopoulos, P.A.² Trapalis, C.³ Kordas, G.⁴ Karakassides, M.A.⁵ Pilakouta, M.⁶

16
- 0032372226
- Wang X., Masumoto H., Someno Y., Hirai T. J. Vac. Sci. Technol. A16:1998;2926.
- (1998) J. Vac. Sci. Technol. , vol.A16 , pp. 2926
- Wang, X.¹ Masumoto, H.² Someno, Y.³ Hirai, T.⁴

17
- 0037492291
- Vergöhl M., Malokomes N., Steadler T., Matthee T., Ritcher U. Thin Solid Films. 351:1999;42.
- (1999) Thin Solid Films , vol.351 , pp. 42
- Vergöhl, M.¹ Malokomes, N.² Steadler, T.³ Matthee, T.⁴ Ritcher, U.⁵

18
- 0011111233
- J.M. Besmann, M.D. Allendorf, Mc.D. Robinson, R.K. Ulrich (Eds.), LA, CA, USA, 5-10 May
- th International Conference on CVD, LA, CA, USA, 5-10 May 1996, p. 452.
- (1996) th International Conference on CVD , pp. 452
- VanderLeeden, G.A.¹ Nguyen, A.T.² Nguyen, D.V.³ Hiolemen, D.E.⁴

19
- 0031998568
- Bertin F., Chabli A., Chiariglione E., Burdin M., Bergr M., Boudet T., Lantigue O., Ravel G. Thin Solid films. 313-314:1998;68.
- (1998) Thin Solid films , vol.313-314 , pp. 68
- Bertin, F.¹ Chabli, A.² Chiariglione, E.³ Burdin, M.⁴ Bergr, M.⁵ Boudet, T.⁶ Lantigue, O.⁷ Ravel, G.⁸

20
- 0003808259
- North-Holland, Amsterdam
- R.M.A. Azzam, N.M. Bashara, in: Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

21
- 36849101400
- Jasperson S.N., Schnatterly S.E. Rev. Sci. Instrum. 40:1969;761.
- (1969) Rev. Sci. Instrum. , vol.40 , pp. 761
- Jasperson, S.N.¹ Schnatterly, S.E.²

22
- 84975551877
- Mollenauer L.F., Downie D., Engstrom H., Grant W.B. Appl. Opt. 8:1969;661.
- (1969) Appl. Opt. , vol.8 , pp. 661
- Mollenauer, L.F.¹ Downie, D.² Engstrom, H.³ Grant, W.B.⁴

23
- 0014552554
- Kemp J.C. J. Opt. Soc. Am. 59:1969;950.
- (1969) J. Opt. Soc. Am. , vol.59 , pp. 950
- Kemp, J.C.¹

24
- 0020155076
- Drevellion B., Perrin J., Marbot R., Violet A., Dalby J.L. Rev. Sci. Instrum. 53:1982;969.
- (1982) Rev. Sci. Instrum. , vol.53 , pp. 969
- Drevellion, B.¹ Perrin, J.² Marbot, R.³ Violet, A.⁴ Dalby, J.L.⁵

25
- 0034140180
- Bhattacharyya D., Sahoo N.K., Thakur S., Das N.C. Thin Solid Films. 360:2000;96.
- (2000) Thin Solid Films , vol.360 , pp. 96
- Bhattacharyya, D.¹ Sahoo, N.K.² Thakur, S.³ Das, N.C.⁴

26
- 4243221714
- Jellison G.E. Jr. Thin Solid Films. 313-314:1993;33.
- (1993) Thin Solid Films , vol.313-314 , pp. 33
- Jellison G.E., Jr.¹

27
- 0015680774
- Hauge P.S., Dill F.H. Int. Br. Med. J. Res. Dev. 17:1973;472.
- (1973) Int. Br. Med. J. Res. Dev. , vol.17 , pp. 472
- Hauge, P.S.¹ Dill, F.H.²

28
- 43949164381
- Russev S., Valcheva E., Germanova K. Thin Solid Films. 233:1993;231.
- (1993) Thin Solid Films , vol.233 , pp. 231
- Russev, S.¹ Valcheva, E.² Germanova, K.³

29
- 0032000416
- Popov K.V., Tikhonravov A.V., Campmany J., Bertran E., Bosch S., Canillas A. Thin Solid Films. 313-314:1998;379.
- (1998) Thin Solid Films , vol.313-314 , pp. 379
- Popov, K.V.¹ Tikhonravov, A.V.² Campmany, J.³ Bertran, E.⁴ Bosch, S.⁵ Canillas, A.⁶

30
- 17144442484
- Callard S., Gagnaire A., Joseph J. Thin Solid Films. 313-314:1998;384.
- (1998) Thin Solid Films , vol.313-314 , pp. 384
- Callard, S.¹ Gagnaire, A.² Joseph, J.³

31
- 84882881440
- Bennett J.M., Pelletier E., Albrand G., Borgogno J.P., Lazarides B., Carnigila C.K., Schmell R.A., Allen T.H., Tuttle-Hart T., Guenther K.H., Saxer A. Appl. Opt. 28:1989;3303.
- (1989) Appl. Opt. , vol.28 , pp. 3303
- Bennett, J.M.¹ Pelletier, E.² Albrand, G.³ Borgogno, J.P.⁴ Lazarides, B.⁵ Carnigila, C.K.⁶ Schmell, R.A.⁷ Allen, T.H.⁸ Tuttle-Hart, T.⁹ Guenther, K.H.¹⁰ Saxer, A.¹¹

32
- 0027682032
- Balasubranium K., Han X.F., Guenther H. Appl. Opt. 32:1993;5594.
- (1993) Appl. Opt. , vol.32 , pp. 5594
- Balasubranium, K.¹ Han, X.F.² Guenther, H.³

33
- 0028516346
- Löbl P., Huppertz M., Mergel D. Thin Solid Films. 251:1994;72.
- (1994) Thin Solid Films , vol.251 , pp. 72
- Löbl, P.¹ Huppertz, M.² Mergel, D.³

34
- 84975624060
- de Larivière G.P., Frigerio J.M., Rivory J., Abeles F. Appl. Opt. 31:1992;6056.
- (1992) Appl. Opt. , vol.31 , pp. 6056
- De Larivière, G.P.¹ Frigerio, J.M.² Rivory, J.³ Abeles, F.⁴

35
- 0003991663
- FloryF.R. NY: Marcell Dekker Inc
- Rivory J. Flory F.R., Thin Films for Optical Systems. 1995;1 Marcell Dekker Inc, NY.
- (1995) Thin Films for Optical Systems , pp. 1
- Rivory, J.¹

36
- 0004040706
- PalikE.D. Orlando, FL: Academic Press
- Phillip H.R. Palik E.D., Handbook of Optical Constants of Solids. 1985;749 Academic Press, Orlando, FL.
- (1985) Handbook of Optical Constants of Solids , pp. 749
- Phillip, H.R.¹

37
- 0011011424
- Radecka M., Zakrzewska K., Czternastek H., Stapinski T., Debrus S. Appl. Surf. Sci. 65-66:1993;227.
- (1993) Appl. Surf. Sci. , vol.65-66 , pp. 227
- Radecka, M.¹ Zakrzewska, K.² Czternastek, H.³ Stapinski, T.⁴ Debrus, S.⁵

38
- 0030263036
- Martin N., Rousselot C., Savall C., Palmino F. Thin Solid Films. 287:1996;154.
- (1996) Thin Solid Films , vol.287 , pp. 154
- Martin, N.¹ Rousselot, C.² Savall, C.³ Palmino, F.⁴

39
- 0000321529
- DeLoach J.D., Scarel G., Aita C.R. J. Appl. Phys. 85:1999;2377.
- (1999) J. Appl. Phys. , vol.85 , pp. 2377
- DeLoach, J.D.¹ Scarel, G.² Aita, C.R.³

40
- 0028368703
- Tang H., Prasad K., Sanjines R., Schmid P.E., Levy F. J. Appl. Phys. 75:1994;2042.
- (1994) J. Appl. Phys. , vol.75 , pp. 2042
- Tang, H.¹ Prasad, K.² Sanjines, R.³ Schmid, P.E.⁴ Levy, F.⁵

41
- 0000838694
- Daude N., Gout C., Jouanin C. Phys. Rev. B15:1977;3229.
- (1977) Phys. Rev. , vol.B15 , pp. 3229
- Daude, N.¹ Gout, C.² Jouanin, C.³

42
- 34547122618
- Sato K., Adachi S. J. Appl. Phys. 73:1993;926.
- (1993) J. Appl. Phys. , vol.73 , pp. 926
- Sato, K.¹ Adachi, S.²

43
- 0009260463
- Forouhi A.R., Bloomer I. Phys. Rev. B34:1986;7018.
- (1986) Phys. Rev. , vol.B34 , pp. 7018
- Forouhi, A.R.¹ Bloomer, I.²

44
- 0001364611
- Adachi S. Phys. Rev. B35:1987;7454.
- (1987) Phys. Rev. , vol.B35 , pp. 7454
- Adachi, S.¹

45
- 0000294541
- VedamK. CA: Academic Press
- Chindaudom P., Vedam K. Vedam K., Physics of Thin Films, vol. 19. 1994;191 Academic Press, CA.
- (1994) Physics of Thin Films , vol.19 , pp. 191
- Chindaudom, P.¹ Vedam, K.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.