Optical properties of titania/silica multilayer filters prepared by helicon plasma sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2926-2930

  Wang, X ^a   Masumoto, H ^a   Someno, Y ^b   Hirai, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b ALPS ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032372226     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581441     Document Type: Article

References (12)

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