Spectroscopic ellipsometry with compensator and X-ray specular reflectivity for characterization of thin optical layers on transparent substrates

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 68-72

  Bertin, F ^a   Chabli, A ^a   Chiariglione, E ^a   Burdin, M ^a   Berger, M ^a   Boudet, T ^a   Lartigue, O ^a   Ravel, G ^a  

^a CEA LETI   (France)

Author keywords

Compensator ellipsometry; Transparent materials; X ray specular reflectivity

Indexed keywords

LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL PROPERTIES; SILICA; SPECTROMETRY; SPUTTERING; SUBSTRATES; THICKNESS MEASUREMENT; THIN FILMS; TRANSPARENCY;

X RAY SPECULAR REFLECTIVITY (XRSR);

ELLIPSOMETRY;

EID: 0031998568     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00771-2     Document Type: Article

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