|
Volumn 73, Issue 1, 2002, Pages 78-85
|
In2O3 deposited by reactive evaporation of indium in oxygen atmosphere - Influence of post-annealing treatment on optical and electrical properties
|
Author keywords
Indium oxide; Partial oxygen pressure; Post annealing treatment; Reactive evaporation; Transparent conductive oxide
|
Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
CONDUCTIVE FILMS;
CRYSTALLINE MATERIALS;
DEPOSITION;
ELECTRIC CONDUCTIVITY;
ENERGY GAP;
EVAPORATION;
OPTOELECTRONIC DEVICES;
OXYGEN;
PARTIAL PRESSURE SENSORS;
RATE CONSTANTS;
SUBSTRATES;
PARTIAL OXYGEN PRESSURES;
TRANSPARENT CONDUCTIVE OXIDES;
INDIUM COMPOUNDS;
|
EID: 0037005639
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/S0254-0584(01)00361-3 Document Type: Article |
Times cited : (36)
|
References (26)
|