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Volumn 73, Issue 1, 2002, Pages 78-85

In2O3 deposited by reactive evaporation of indium in oxygen atmosphere - Influence of post-annealing treatment on optical and electrical properties

Author keywords

Indium oxide; Partial oxygen pressure; Post annealing treatment; Reactive evaporation; Transparent conductive oxide

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; CONDUCTIVE FILMS; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC CONDUCTIVITY; ENERGY GAP; EVAPORATION; OPTOELECTRONIC DEVICES; OXYGEN; PARTIAL PRESSURE SENSORS; RATE CONSTANTS; SUBSTRATES;

EID: 0037005639     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(01)00361-3     Document Type: Article
Times cited : (36)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.