Investigations on the annealing effects on reactively deposited ITO thin films

Physica Status Solidi (A) Applied Research

Volumn 160, Issue 1, 1997, Pages 97-104

  Thilakan, P ^a   Kumar, J ^a  

^a ANNA UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; CONDUCTIVE FILMS; CRYSTAL ORIENTATION; CRYSTALLIZATION; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; GLASS; HIGH TEMPERATURE EFFECTS; SEMICONDUCTING FILMS; SUBSTRATES; THIN FILMS;

INDIUM TIN OXIDE (ITO) THIN FILMS; REACTIVE DEPOSITION;

SEMICONDUCTING TIN COMPOUNDS;

EID: 0031097406     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(199703)160:1<97::AID-PSSA97>3.0.CO;2-R     Document Type: Article

References (18)

1. I. HAMBERG and C. G. GRANQVIST, J. Appl. Phys. 60, R12 (1986).
2. T. J. COUTTS and S. NASEEM, Appl. Phys. Letters 46, 164 (1985).
3. P. NATH and R. F. BUNSHAH, Thin Solid Films 69, 63 (1980).
4. PH. PARENT, H. DEXPERT, G. TOURILLON, and J. M. GRIMAL, J. Electrochem. Soc. 139, 276 (1992).
5. PH. PARENT, H. DEXPERT, G. TOURILLON, and J. M. GRIMAL, J. Electrochem. Soc. 139, 282 (1992).
6. O. P. AGNIHOTRI, A. K. SHARMA, B. K. GUPTA, and R. THANGARAJ, J. Phys. D 11, 643 (1978).
7. V. KOROBOV and Y. SHAPIRA, J. Appl. Phys. 75, 2264 (1994).
8. V. VASU and A. SUBRAMANIAN, Thin Solid Films 193/194, 696 (1990).
9. E. KUBOTA, Y. SHIGESATO, M. IGARASHI, T. HARANOU, and K. SUZUKI, Japan. J. Appl. Phys. 33, 4997 (1994).
10. P. THILAKAN, S. KALAINATHAN, J. KUMAR, and P. RAMASAMY, J. Electronic Mater. 20, 719 (1995).
11. M. ROTTMANN and K. HECKNER, J. Phys. D 28, 1448 (1995).
12. H. FRITZSCHE, B. PASHMAKOV, and B. CLAFLIN, Solar Energy Mater. Solar Cells 32, 383 (1994).
13. N. BALASUBRAMANIAN and A. SUBRAMANIAN, J. Phys. D 22, 206 (1989).
14. LI-JIAN MENG and M. P. DOS SANTOS, Vacuum 45, 1191 (1994).
15. W. D. JOHNSTON, JR., Solar Voltaic Cells, Marcel Dekker, Inc., New York 1980 (p. 66).
16. LI-JIAN MENG, A. MACARICO, and R. MARTINS, Vacuum 46, 673 (1995).
17. G. FRANK, E. KAUER, and KÖSTLIN, Thin Solid Films 77, 107 (1981).
18. G. FRANK and KÖSTLIN, Appl. Phys. A 27, 197 (1982).