Physical investigations of DC magnetron sputtered indium tin oxide films

Vacuum

Volumn 47, Issue 1, 1996, Pages 91-93

  Uthanna, S ^a   Reddy, P S ^a   Naidu, B S ^a   Jayarama Reddy, P ^a  

^a SRI VENKATESWARA UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; GLASS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; MELTING; OPTICAL PROPERTIES; OXYGEN; SUBSTRATES; X RAY ANALYSIS;

DC MAGNETRON REACTIVE SPUTTERING TECHNIQUE; ENERGY DISPERSIVE X-RAY ANALYSIS; INDIUM TIN OXIDE FILMS; SCANNING AUGER MICROSCOPY; SUBSTRATE TEMPERATURE;

INDIUM COMPOUNDS;

EID: 0029734524     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(95)00199-9     Document Type: Article

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