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Diamond and Related Materials

Volumn 11, Issue 12, 2002, Pages 1946-1951

Nanoporosity in plasma deposited amorphous carbon films investigated by small-angle X-ray scattering

(5) Jacobsohn, L G a Capote, G a Maia da Costa, M E H a Franceschini, D F b Freire, Jr a

a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO (Brazil)

b FLUMINENSE FEDERAL UNIVERSITY (Brazil)

Author keywords

Amorphous carbon; Amorphous hydrogenated carbon; Deposition; Microstructure

Indexed keywords

CARBON; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PORE SIZE; POROSITY; VOLUME FRACTION; X RAY SCATTERING;

SMALL-ANGLE X-RAY SCATTERING;

AMORPHOUS FILMS;

INORGANIC COATING;

EID: 0036994039 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(02)00213-3 Document Type: Article

Times cited : (11)

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