Synthesis of C-axis oriented AlN thin films on metal layers: Al, Mo, Ti, TiN and Ni.

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 311-315

  Iriarte, G F ^a   Bjurstrom J ^a   Westlinder, J ^a   Engelmark, F ^a   Katardjiev, I V ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ALUMINUM NITRIDE; ELECTRODES; MAGNETRON SPUTTERING; MOLYBDENUM; NICKEL; PIEZOELECTRIC MATERIALS; SYNTHESIS (CHEMICAL); TEXTURES; THIN FILMS; TITANIUM; TITANIUM NITRIDE;

PIEZOELECTRIC FILMS; THIN FILM BULK ACOUSTIC RESONATOR; THIN FILM SURFACE ACOUSTIC RESONATOR; THIN PIEZOELECTRIC POLYCRYSTALLINE FILMS;

ACOUSTIC RESONATORS;

EID: 0036992226     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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