Optical characterization of AlN films: Measurement of stress

Materials Chemistry and Physics

Volumn 50, Issue 1, 1997, Pages 50-56

  Chakrabarti, K ^a   Chattopadhyay, K K ^b   Chaudhuri, S ^a   Pal, A K ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

^b JADAVPUR UNIVERSITY   (India)

Author keywords

AlN films; Optical characterization; Stress

Indexed keywords

AMORPHOUS FILMS; ENERGY GAP; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; STRAIN; STRESSES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

POLYCRYSTALLINE FILMS; STRESS MEASUREMENT;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0031208110     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(97)80183-6     Document Type: Article

References (38)

1. N. Hashimoto, Y. Sawada, T. Bando, H. Yoden and S. Deki, J. Am. Ceram. Soc., 74 (1991) 1282.
2. S. Fujieda, M. Mizuta and Y. Matsumoto, Jpn. J. Appl. Phys., 27 (1988) L296.
3. M. Kishi, K. Takahashi, M. Suzuki, J. Tsuneyoshi, K. Ogawa and M. Hata, Proc. 3rd Int. Conf. High Technology, Chiba, 1992.
4. U. Wahlstrom, L. Huttman, J.E. Sundgren, F. Adibi, I. Petrov and J.E. Greene, Thin Solid Films, 235 (1993) 62.
5. C.R. Aita, C.J.G. Kubiak and F.Y.H. Shih, J. Appl. Phys., 66 (1989) 4360.
6. D. McIntyre, J.E. Greene, G. Hakanssan, J.E. Sundgren and W.D. Munz, J. Appl. Phys., 67 (1990) 1542.
7. W.R.L. Lambrecht and B. Segall, Phys. Rev, B, 43 (1991) 7070.
8. J.H. Harris, R.A. Youngman and R.G. Teller, J. Mater. Res., 5 (1990) 1763.
9. K. Wateri, K. Ishizaki and F. Tsuchiya, J. Mater. Sci., 28 (1993) 3709.
10. W.A. Groen, J.G. Vanlierop and A. Roosen, J. Mater. Sci. Lett., 12 (1993) 1224.
11. A. Hafdi, M. Billy and J.P. Lecompte, J. Mater. Sci., 27 (1992) 3405.
12. E.J. Bienk, H. Jensen, G.N. Pedersen and G. Sorensen, Thin Solid Films, 250 (1993) 121.
13. R. McMahon, J. Affinite and R.R. Parsons, J. Vac. Sci. Technol., 20 (1983) 376.
14. W.J. Meng, J.A. Sell, G.L. Eesley and T.A. Perry, J. Appl. Phys., 74 (1993) 2411.
15. W.J. Meng, J.A. Sell, G.L. Eesley and T.A. Perry, J. Vac. Sci. Technol., A11 (1993) 1377.
16. W.J. Meng, J.A. Sell, T.A. Perry, L.E. Rehn and P.M. Baldo, J. Appl. Phys., 75 (1994) 3446.
17. G. Este and D. Westwood, J. Vac. Sci. Technol., AI5 (1987) 1892.
18. W.A. Groen, J.G. Vanliecrop and J.M. Toonen, J. Eur. Ceram. Soc., 11 (1993) 353.
19. J.C. Loretz, B. Despax, P. Marti and A. Mazel, Thin Solid Films, 265 (1995) 15.
20. R. Zarwasch, E. Rille and H.K. Pulker, J. Appl. Phys., 71 (1992) 5275.
21. T.K. Hatwar, Appl. Phys. Commun., 11 (1992) 471.
22. N.Q. Danh, K.H. Monz and H.K. Pulker, Thin Solid Films, 257 (1995) 116.
23. J.C. Manifacier, M. de Murcia, J.P. Fillard and E. Vicario, Thin Solid Films, 41 (1977) 127.
24. X. Li, T.S. Tansley and V.W.L. Chin, Thin Solid Films, 250 (1994) 263.
25. K.H. Monz, N.Q. Danh, M. Hunter, E.P. Rille and H.K. Pulker, Vak. Forsch. Praxis, 3 (1995) 221.
26. P.B. Legrand, M. Wautelet, B. Dugnoilie, J.P. Dauchot and M. Hecq, Thin Solid Films, 248 (1994) 220.
27. C.R. Aita and C.J. Gawlak, J. Vac. Sci. Technol., A1 (1983) 403.
28. T.D. Moustakas, T. Lei, R.J. Molnar, C. Fountzoulas and E.J. Oles, Mater. Res. Soc. Symp. Proc., 242 (1992) 599.
29. A.B. Maity, M. Basu, S. Chaudhuri and A.K. Pal, J. Phys. D. Appl. Phys., 25 (1995) 2547.
30. R. Koch, J. Phys.: Condensed Matter, 6 (1994) 9519.
31. G.H. Leusink, T.G.M. Oosterlaken, G.C.A.M. Janssen and S. Radelaar, J. Appl. Phys., 74 (1993) 3899.
32. R.W. Hoffman, Phys. Thin Films, 3 (1969) 248.
33. J. Taue, Mater. Res. Bull., 5 (1970) 721.
34. J. Szczyrbowski, Phys. Status Solidi B, 105 (1981) 515.
35. A.B. Maity, S. Chaudhuri and A.K. Pal, Phys. Status Solidi B, 183 (1994) 185.
36. B. Maiti, P. Gupta, A.B. Maiti, S. Chaudhuri and A.K. Pal, Mater. Chem. Phys., 39 (1995) 167.
37. C.D. Hodgman, R.C. Weast and S.M. Selby (eds.), Handbook of Chemistry and Physics, CRC, Cleveland, OH, 1959, p. 2239.
38. Landolt-Börnstein Numerical Data and Functional Relationships in Science and Technology, New Series, Group III, Vol. 17a, Springer, New York, 1982, p. 158.