Construction and characterization of the fringe field monochromator for a field emission gun

Ultramicroscopy

Volumn 81, Issue 3-4, 2000, Pages 129-139

  Mook, H W ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON GUNS; ELECTRON MICROSCOPES; FIELD EMISSION MICROSCOPES; LIGHT SOURCES; OPTICAL DESIGN; OPTICAL FILTERS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SPECTROMETERS; TRANSMISSION ELECTRON MICROSCOPY;

CHROMATIC BLUR; ENERGY FILTER; ENERGY SELECTION SLIT; FIELD EMISSION GUN; FRINGE FIELD MONOCHROMATOR; FRINGE FIELD WEIN FILTER; INTRINSIC ENERGY; SCHOTTKY FIELD EMISSION GUN; SPECTRAL RESOLUTION;

MONOCHROMATORS;

ARTICLE; BRIGHTNESS; ELECTRIC POTENTIAL; ELECTRON ENERGY LOSS SPECTROSCOPY; FILTER; FILTRATION; IMAGING; LENS; OPTICAL RESOLUTION; SCANNING ELECTRON MICROSCOPY;

EID: 0034107054     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00193-X     Document Type: Article

References (19)

1. Batson P.E. Ultramicroscopy. 78:1999;33.
2. Batson P.E. J. Microsc. 180:1995;204.
3. Terauchi M.et al. Microsc. Microanal. Microstruct. 2:1991;351.
4. Tsuno K., Rouse J. J. Electron Microsc. 45:1996;417.
5. Troyon M. Microelectron. Eng. 6:1987;105.
6. Mook H.W., Kruit P. Ultramicroscopy. 78:1999;43.
7. Rose H. Ultramicroscopy. 78:1999;13.
8. Tiemeijer P. Ultramicroscopy. 78:1998;53.
9. Mook H.W., Kruit P. Nucl. Instr. and Meth. A. 427:1999;109.
10. H.W. Mook, P. Kruit, The Fringe Field Monochromator, Thesis, Delft University of Technology, 2000, ISBN 90-901 354 8-0.
11. H.W. Mook, A.H.V. van Veen, P. Kruit, Microsc. Microanal. 5, Suppl. 2: Proc. (1999) 646.
12. H.W. Mook, P.E. Batson, Microsc. Microanal. 5, Suppl. 2: Proc. (1999) 648.
13. H.W. Mook, P.E. Batson, P. Kruit, Inst. Phys. Conf. Ser. 161, IOP, 1999, pp. 223-226.
14. Stepanov I.S.et al. Microelectron. Eng. 46:1999;435.
15. Programs developed at Charged Particle Optics, Delft University of Technology, The Netherlands.
16. Lenc M., Lencova B. Optik. 78:1988;127.
17. Fransen M.J.et al. J. Vac. Sci. Technol. B. 16(4):1998;2063.
18. P.W. Hawkes, E. Kasper, Principles of Electron Optics, Vol. 2, Academic Press, New York, 1989 (Chapter 47).
19. Batson P.E. Rev. Sci. Instr. 57/1:1986;43.