Wafer bonding for the fabrication of high-performance photodetectors: A mature technology?

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2002, Pages 677-678

  Pauchard, A ^a   Pan, Z ^a   Bitter, M ^a   Kang, Y ^b   Mages, P ^b   Hummel, S G ^a   Yu, P K L ^a   Lo, Y H ^a  

^a Nova Crystals Inc   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AVALANCHE DIODES; BONDING; CAVITY RESONATORS; INTEGRATED OPTOELECTRONICS; PHOTODETECTORS; PHOTODIODES; QUANTUM EFFICIENCY; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES; THERMAL CONDUCTIVITY;

AVALANCHE PHOTODIODES; INDIUM GALLIUM ARSENIDE PHOTODIODE; INDIUM PHOSPHIDE PHOTODIODE; RESONANT CAVITY PHOTODETECTORS; WAFER BONDING;

SILICON WAFERS;

EID: 0036925229     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

1. Y.C. Zhou et al., Appl. Phys. Lett., 73(16), p.2337, 1998.
2. Y. Qian et al., IEEE Photon. Technol. Lett., vol. 9, pp. 8-10, 1997.
3. D.L. Babic et al., IEEE Photon. Technol. Lett., vol. 7, pp. 1225-1227, 1995.
4. F.A. Kish et al., Appl. Phys. Lett., 64, pp. 2839-2841, 1994.
5. I.-H. Tan et al., IEEE Photon. Technol. Lett, vol. 6, pp. 811-813, 1994.
6. S.S. Murtaza et al., IEEE Photon. Technol. Lett., vol. 7, pp. 679-681, 1995.
7. M.F. Vilela et al., J. Electronic Materials, vol. 30 (7), 2001.
8. F.E. Ejeckam et al., Appl. Phys. Lett., 67 (26), 1995.
9. B.F. Levine et al., Appl. Phys. Lett., 70 (18), pp. 2449-2451, 1997.
10. B.F. Levine et al., Appl. Phys. Lett., 71 (11), pp. 1507-1509, 1997.
11. B.F. Levine, et al., Appl. Phys. Lett., 75 (14), pp. 2141-2143, 1999.
12. A.R. Hawkins et al., IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS'95), paper IO2.3, 1995.
13. A.R. Hawkins, et al., Appl. Phys. Lett., 70 (3), pp. 303-305, 1997.
14. Y. Kang et al., IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS'01), paper ThN4, 2001.
15. A. Pauchard et al., Proceedings of SPIE, vol. 4650, pp. 37-43, 2002.
16. A. Pauchard et al., Technical digest of the Optical Fiber Communication Conference (OFC'02), pp. 344-345, 2002.
17. Z. Pan et al., to be presented at the Asia-Pacific optical and wireless communications (APOC'02), Beijing, November 2002.