Effects of mechanical strain on amorphous silicon thin-film transistors

Materials Research Society Symposium - Proceedings

Volumn 715, Issue , 2002, Pages 667-678

  Gleskova, H ^a   Wagner, S ^a   Soboyejo, W ^a   Suo, Z ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); LEAKAGE CURRENTS; POLYIMIDES; SEMICONDUCTOR DEVICE MANUFACTURE; STRAIN; STRESSES; STRETCHING; THIN FILM TRANSISTORS;

MOBILITY CHANGES; TENSILE STRAIN; UNIAXIAL COMPRESSIVE STRAIN;

AMORPHOUS SILICON;

EID: 0036924901     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-715-a3.4     Document Type: Conference Paper

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