Reaction processes for low temperature (<150 °C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates

Materials Research Society Symposium - Proceedings

Volumn 508, Issue , 1998, Pages 19-24

  Parsons, Gregory N ^a   Yang, Chien Sheng ^a   Klein, Tonya M ^a   Smith, Laura ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; HYDROGEN BONDS; LOW TEMPERATURE OPERATIONS; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTICS; SILICON NITRIDE;

CHARGE TRAPPING;

THIN FILM TRANSISTORS;

EID: 0032320537     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-508-19     Document Type: Conference Paper

References (14)