Tri-layer a-Si:H integrated circuits on polymeric substrates

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 253-256

  Thomasson, Daniel B ^a   Bonse, Mathias ^a   Huang, Jiunn Ru ^a   Wronski, Christopher R ^a   Jackson, Thomas N ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; HYDROGEN; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; OSCILLATORS (ELECTRONIC); POLYIMIDES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SUBSTRATES;

RING OSCILLATORS;

THIN FILM TRANSISTORS;

EID: 0032257648     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)