Molecular dynamics simulation of thin film nucleation through molecular cluster beam deposition: Effect of incident angle

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 195, Issue 3-4, 2002, Pages 329-338

  Hu, Yanhong ^a   Sinnott, Susan B ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

Angle effects; Molecular dynamics simulations; Organic cluster beam deposition; Thin film nucleation

Indexed keywords

COMPUTER SIMULATION; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DEPOSITION; MOLECULAR BEAMS; NUCLEATION; PARAMETER ESTIMATION; THIN FILMS;

ANGLE EFFECTS; INCIDENT ENERGY;

MOLECULAR DYNAMICS;

EID: 0036798778     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01135-7     Document Type: Article

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