Tunable millimeter-wave filters using a coplanar waveguide and micromachined variable capacitors

Journal of Micromechanics and Microengineering

Volumn 11, Issue 6, 2001, Pages 706-712

  Park, J H ^a   Kim, H T ^a   Kwon, Y ^a   Kim, Y K ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC LINES; MICROMACHINING; MILLIMETER WAVES; NATURAL FREQUENCIES; RESONATORS; WAVEGUIDES;

MILLIMETER-WAVE TUNABLE FILTERS;

BANDPASS FILTERS;

EID: 0035505199     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/6/313     Document Type: Article

References (14)

1. Distributed MEMS true-time delay phase shifters and wide-band switches
2. High performance microshield line components
3. A microactuated millimeter wave phase shifter
4. Considerations in the use of coplanar waveguide for millimeter-wave integrated circuits
5. New coplanar-like transmission lines for application in monolithic integrated millimeter-wave and submillimeter-wave circuits
6. LIGA micromachined planar transmission lines and filters
7. Low-loss micromachined filters for millimeter-wave telecommunication systems
8. Micromachined self-packaged W-band bandpass filters
9. A low-loss 20 GHz micromachined bandpass filter
10. Micromachined micropackaged filter banks
11. A micromachined variable capacitor for monolithic low-noise VCOS
12. A low-noise rf voltage-controlled oscillator using on-chip high-Q three-dimensional coil inductor and micromachined variable capacitor
13. Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD)
14. Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode