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Volumn 513, Issue 2, 2002, Pages 256-262
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Kinetics of tertiarybutylphosphine adsorption and phosphorus desorption from indium phosphide (0 0 1)
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Author keywords
Indium phosphide; Surface chemical reaction
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Indexed keywords
ACTIVATION ENERGY;
ADSORPTION;
DESORPTION;
METALLORGANIC VAPOR PHASE EPITAXY;
RATE CONSTANTS;
SEMICONDUCTING INDIUM PHOSPHIDE;
REFLECTANCE DIFFERENCE SPECTROSCOPY;
SURFACE REACTIONS;
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EID: 0036645591
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(02)01819-8 Document Type: Article |
Times cited : (13)
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References (32)
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