Cluster size measurement of large Ar cluster ions with Time of Flight

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 1234-1237

  Toyoda, Noriaki ^a   Saito, Masahiro ^a   Hagiwara, Norihisa ^a   Matsuo, Jiro ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; IONIZATION; MONOMERS;

CLUSTER SIZE DISTRIBUTION; TIME OF FLIGHT (TOF) MASS ANALYZERS;

ION BEAMS;

EID: 0033353852     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)