Indium oxide film formation by O2 cluster ion-assisted deposition

Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 258-261

  Qin, Wei ^a   Howson, Ronald Philip ^b   Akizuki, Makoto ^a   Matsuo, Jiro ^a   Takaoka, Gikan ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

^b LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Cluster ions; Indium oxide film; Non critical process; Room temperature

Indexed keywords

ANNEALING; DEPOSITION; ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; ION BEAMS; IONS; OXYGEN; SUBSTRATES; TRANSPARENCY;

CLUSTER ION; INDIUM TIN OXIDE FILM; NON CRITICAL PROCESS; OXYGEN CLUSTER ION ASSISTED DEPOSITION; OXYGEN CLUSTER ION BEAM;

CONDUCTIVE FILMS;

EID: 0032119663     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00109-6     Document Type: Article

References (14)

1. A.A. Karim, C. Deshpandey, H.J. Doerr, R.F. Bunshah, Thin Solid Films 172 (1989) 111.
2. K.L. Chopra, I. Kaur, Thin Film Devices and Applications, Plenum, New York, 1983.
3. R.P. Howson, I. Safi, G.W. Hall, N. Danson, Nucl. Instrum. Methods Phys. Res. B 8848 (1996) xxxC.
4. L.A. Rykara, V.S. Salum, I.A. Serbinov, Thin Solid Films 92 (1982) 327.
5. E. Giani, R. Kelly, J. Electrochem. Soc. 121 (1960) 992.
6. G. Groth, Phys. Stat. Solidi 14 (1969) 69.
7. A. Mjorstsberg, I. Hamberg, C.G. Granquist, Thin Solid Films 90 (1980) 323.
8. P. Nath, R.F. Bunshah, Thin Solid Films 69 (1980) 63.
9. Y. Suzuki, F. Nino, S. Okada, M. Yoshida, 1994 SID International Symposium Digest of Technical Paper SID, vol. xviii + 996, 1994, p. 943.
10. M. Akizuki, J. Matsuo, M. Harada, S. Ogasawara, A. Doi, K. Yoneda, T. Yamaguchi, G.H. Takaoka, C.E. Ascheron, I. Yamada, Nucl. Instrum. Methods Phys. Res. B 99 (1-4) (1995) 229.
11. M. Akizuki, J. Matsuo, S. Ogasawara, M. Harada, A. Doi, I. Yamada, Jpn. J. Appl. Phys. 35 (2B) (1996) 1450.
12. M. Akizuki, J. Matsuo, I. Yamada, M. Harada, S. Ogasawara, A. Doi, Nucl. Instrum. Methods Phys. Res. 112 (1-4) (1996) 83.
13. M. Akizuki, J. Matsuo, W. Qin, M. Harada, S. Ogasawara, A. Doi, I. Yamada, Nucl. Instrum. Methods Phys. Res. 121 (1-4) (1997) 166.
14. M. Akizuki, J. Matsuo, M. Harada, S. Ogasawara, A. Doi, I. Yamada, Mater. Sci. Eng. A217-A218 (1995) 78.