A systematic approach to simulating rapid thermal processing systems

Journal of the Electrochemical Society

Volumn 143, Issue 6, 1996, Pages 2035-2043

  Merchant, Tushar P ^a,c   Cole, J Vernon ^a,e   Knutson, Karson L ^a,b,d   Hebb, Jeffrey P ^a   Jensen, Klavs F ^a,b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b ELECTROCHEMICAL SOCIETY

^c MOTOROLA INC   (United States)

^d AG Associates Inc   (United States)

^e MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; HEAT TRANSFER; MATHEMATICAL MODELS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACES; TRANSPORT PROPERTIES;

RADIATIVE EXCHANGE FACTORS; RAPID THERMAL PROCESSING;

MICROELECTRONIC PROCESSING;

EID: 0030163947     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836945     Document Type: Article

References (30)

1. S. Metha and D. Hodul, Mater. Res. Soc. Symp. Proc., 92, 95 (1987).
2. S. R. Wilson, R. B. Gregory, and W. M. Paulson, ibid., 52, 181 (1986).
3. M. L. Green, D. Brasen, H. Luftman, and V. C. Kannan, J. Appl. Phys., 65, 2558 (1989).
4. F. Roozeboom, Mater. Res. Soc. Symp. Proc., 303, 149 (1993)
5. H. A. Lord, IEEE Trans. Semicond. Manuf., SM-1, 105 (1988).
6. R. Kakoschke, E. Bussmann, and H. Foll, Appl. Phys. A, 52, 52 (1991).
7. K. L. Knutson, S. A. Campbell, and F. Dunn, IEEE Trans. Semicond. Manuf., SM-7, 68 (1994).
8. A. Kersch, H. Schafer, and C. Werner, IEDM Tech. Dig., 883 (1991).
9. S. A. Campbell and K. L. Knutson, IEEE Trans. Semicond. Manuf., SM-5, 302 (1992).
10. S. Chatterjee, I. Trachtenberg, and T. F. Edgar, This Journal, 139, 3682 (1992).
11. C. R. Kleijn and M. Meyyappan, Computational Modeling in Semiconductor Processing, Chap. 4, Artech House, Boston, MA (1995).
12. K. F. Jensen, in M. L. Hitchman and K. F. Jensen, Chemical Vapor Deposition - Principles and Applications, Chap. 2, Academic Press, Ltd., London (1993).
13. T. P. Merchant, Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA (1995).
14. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena, John Wiley & Sons, New York (1960).
15. R. Siegel and J. R. Howell, Thermal Radiation Heat Transfer, McGraw Hill, New York (1992).
16. J. V. Cole, K. L. Knutson, and K. F. Jensen, Mater. Res. Soc. Symp. Proc., 342, 425 (1994).
17. A. Kersch and W. J. Morokoff, Transport Simulation in Microelectronics, Birkhäuser, Berlin, 1995.
18. J. P. Hebb and K. F. Jensen, This Journal, 143, 1142 (1996).
19. T. Sato, Jpn. J. Appl. Phys., 6, 339 (1967).
20. H. Walk and T. Theiler, Proceedings Second International Conference on Rapid Thermal Processing, R. B. Fair and B. Lojek, Editors, p. 194, Monterey, CA (1994).
21. O. C. Zienkiewicz, The Finite Element Method, McGraw-Hill, New York (1977).
22. K. E. Brenan, S. L. Campbell, and L. R. Petzold, Numerical Solution of Initial Value Problems in Differential-Algebraic Equations, Elsevier, New York (1989).
23. P. Hood, Int. J. Numer. Meth. Eng., 10, 379 (1976).
24. ICEM CFD/CAE V. 3.1, ICEM CFD Engineering, Berkeley, CA (1993).
25. FIDAP V.7.5, Fluids Dynamics International, Evanston, IL (1995).
26. K. L. Knutson, T. P. Merchant, J. V. Cole, J. P. Hebb, T. G. Mihopoulos, and K. F. Jensen, in Proceedings of Second International Conference on Rapid Thermal Processing, R. B. Fair and B. Lojek, Editors, p. 146, Monterey, CA (1994).
27. AG Associates, 4425 Fortran Drive, San Jose, CA 95134.
28. A. J. Bauer, E. P. Burte, and H. Ryssel, Proceedings of Second International Conference on Rapid Thermal Processing, R. B. Fair and B. Lojek, Editors, p. 152, Amsterdam, The Netherlands (1995).
29. G. Aral, T. P. Merchant, J. V. Cole, K. L. Knutson, and K. F. Jensen, in Proceedings of the International Conference on Rapid Thermal Processing , R. B. Fair and B. Lojek, Editors, p. 288, Monterey, CA (1994).
30. K. F. Jensen, H. Simka, T. G. Mihopoulos, P. Futerko, and M. Hierlemann, in Advances in Rapid Thermal and Integrated Processing, F. Roozeboom, Editor, p. 305, Kluwer Academic Publishing, Dordrecht, The Netherlands (1996).