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Volumn 122, Issue 1, 2000, Pages 165-170

Rayleigh light scattering measurements of transient gas temperature in a rapid chemical vapor deposition reactor

Author keywords

Heat transfer; Mixed convection; Nonintrusive diagnostics; Transient; Vapor deposition

Indexed keywords

GAS; NON-INTRUSIVE MEASUREMENT; TEMPERATURE MEASUREMENT; VAPOR DEPOSITION;

EID: 0034022302     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.521447     Document Type: Article
Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.