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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 509-513

Channeling study of lattice disorder and gold implants in gallium nitride

(4) Jiang, Weilin a Weber, W J a Thevuthasan, S a Shutthanandan, V a

a PACIFIC NORTHWEST NATIONAL LABORATORY (United States)

Author keywords

Disorder accumulation and recovery; GaN; Ion channeling analysis; Ion irradiation

Indexed keywords

AMORPHIZATION; ANNEALING; CRYSTAL LATTICES; GOLD; ION IMPLANTATION; IRRADIATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING FILMS; SINGLE CRYSTALS;

ION IRRADIATION; LATTICE DISORDERS;

GALLIUM NITRIDE;

EID: 0036574367 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(02)00601-8 Document Type: Conference Paper

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.