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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 592-597

The use of ion channeling and elastic recoil detection in determining the mechanism of cleavage in the ion-cut process

(8) Hochbauer T a Nastasi, M a Verda, R D a Misra, A a Henttinen, K b Suni, I b Lau, S S c Mayer, J W d

a LOS ALAMOS NATIONAL LABORATORY (United States)

b VTT TECHNICAL RESEARCH CENTRE OF FINLAND (Finland)

c UNIVERSITY OF CALIFORNIA (United States)

d ARIZONA STATE UNIVERSITY (United States)

Author keywords

Fracture mechanics; Implantation; Ion cut; Silicon on insulator

Indexed keywords

CORRELATION METHODS; CRYSTALS; FRACTURE MECHANICS; ION IMPLANTATION; RAPID THERMAL ANNEALING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; STRAIN; SUBSTRATES; THERMAL EFFECTS;

ELASTIC RECOIL DETECTION; ION CHANNELING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0036570178 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)01306-4 Document Type: Conference Paper

Times cited : (6)

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