Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 183, Issue 3-4, 2001, Pages 401-412

  Verda, R D ^a   Maggiore, C J ^a   Tesmer, J R ^a   Misra, A ^a   Hoechbauer, T ^a   Nastasi, M ^a   Bower, R W ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Calibration standards; Computer simulation; Depth profiling

Indexed keywords

CALIBRATION; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DEMODULATION; ELASTICITY TESTING; HYDROGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

DEPTH PROFILING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

SILICON;

EID: 0035477977     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00635-8     Document Type: Article

References (22)