Accurate hydrogen depth profiling by reflection elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 419-422

  Verda, R D ^a   Tesmer, J R ^a   Nastasi, M ^a   Bower, R W ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Depth profiling; Energy calibration; Energy spread; Geometric alignment

Indexed keywords

CALIBRATION; HIGH ENERGY PHYSICS; HYDROGEN; PARTICLE BEAMS; SPECTRUM ANALYSIS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

PARTICLE DETECTORS;

EID: 0036569453     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00473-1     Document Type: Conference Paper

References (10)