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Journal of Applied Physics

Volumn 91, Issue 7, 2002, Pages 4136-4142

Difference of secondary defect formation by high energy B + and Al + implantation into 4H-SiC

(2) Ohno, Toshiyuki a Kobayashi, Naoto a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT SIZE; HIGH ENERGY; IMPLANTED IONS; IMPLANTED LAYERS; INTERSTITIALS; ION SPECIES; SECONDARY DEFECT; SELF-DIFFUSION; VOLUME CONCENTRATION;

ACTIVATION ENERGY; AGGLOMERATION; ALUMINUM; DEFECTS; HIGH ENERGY PHYSICS; IONS; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY;

DEFECT DENSITY;

EID: 0036536037 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1457540 Document Type: Article

Times cited : (33)

References (21)

1
- 0031675106
- msf MSFOEP 0255-5476
- T. Iwasaki, T. Ohno, K. Asano, Y. Sugawara, and T. Yatsuo, Mater. Sci. Forum 264-268, 1085 (1998). msf MSFOEP 0255-5476
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 1085
- Iwasaki, T.¹ Ohno, T.² Asano, K.³ Sugawara, Y.⁴ Yatsuo, T.⁵

2
- 4243374758
- msf MSFOEP 0255-5476
- N. Miyamoto, A. Saitoh, T. Kimoto, H. Matsunami, Y. Hishida, and M. Watanabe, Mater. Sci. Forum 338-342, 1347 (2000). msf MSFOEP 0255-5476
- (2000) Mater. Sci. Forum , vol.338-342 , pp. 1347
- Miyamoto, N.¹ Saitoh, A.² Kimoto, T.³ Matsunami, H.⁴ Hishida, Y.⁵ Watanabe, M.⁶

3
- 0000893971
- jaJAPIAU 0021-8979
- M. V. Rao, J. Gardner, P. H. Chi, O. W. Holland, G. Kelner, J. Kretchmer, and M. Ghezzo, J. Appl. Phys. 81, 6635 (1997). jap JAPIAU 0021-8979
- (1997) J. Appl. Phys. , vol.81 , pp. 6635
- Rao, M.V.¹ Gardner, J.² Chi, P.H.³ Holland, O.W.⁴ Kelner, G.⁵ Kretchmer, J.⁶ Ghezzo, M.⁷

4
- 0031191985
- psa PSSABA 0031-8965
- T. Troffer, M. Schadt, T. Frank, H. Itoh, G. Pensl, J. Heindl, H. P. Strunk, and M. Maier, Phys. Status Solidi A 162, 277 (1997). psa PSSABA 0031-8965
- (1997) Phys. Status Solidi A , vol.162 , pp. 277
- Troffer, T.¹ Schadt, M.² Frank, T.³ Itoh, H.⁴ Pensl, G.⁵ Heindl, J.⁶ Strunk, H.P.⁷ Maier, M.⁸

5
- 0032648610
- jem JECMA5 0361-5235
- T. Ohno, H. Onose, Y. Sugawara, K. Asano, T. Hayashi, and T. Yatsuo, J. Electron. Mater. 28, 180 (1999). jem JECMA5 0361-5235
- (1999) J. Electron. Mater. , vol.28 , pp. 180
- Ohno, T.¹ Onose, H.² Sugawara, Y.³ Asano, K.⁴ Hayashi, T.⁵ Yatsuo, T.⁶

6
- 0000017816
- jaJAPIAU 0021-8979
- T. Ohno and N. Kobayashi, J. Appl. Phys. 89, 933 (2001). jap JAPIAU 0021-8979
- (2001) J. Appl. Phys. , vol.89 , pp. 933
- Ohno, T.¹ Kobayashi, N.²

7
- 14344270798
- msf MSFOEP 0255-5476
- P. O. A. Persson and L. Hultman, Mater. Sci. Forum 353-356, 315 (2001). msf MSFOEP 0255-5476
- (2001) Mater. Sci. Forum , vol.353-356 , pp. 315
- Persson, P.O.A.¹ Hultman, L.²

8
- 0003650103
- Academic, New York
- M. Heimendahl, Electron Microscopy of Materials (Academic, New York, 1980), p. 169
- (1980) Electron Microscopy of Materials , pp. 169
- Heimendahl, M.¹

9
- 0011962825
- jaJAPIAU 0021-8979
- C. Bonafos, D. Mathiot, and A. Claverie, J. Appl. Phys. 83, 3008 (1998). jap JAPIAU 0021-8979
- (1998) J. Appl. Phys. , vol.83 , pp. 3008
- Bonafos, C.¹ Mathiot, D.² Claverie, A.³

10
- 0023860584
- apa APSFDB 0721-7250
- K. S. Jones, S. Prussin, and E. R. Weber, Appl. Phys. A: Solids Surf. 45, 1 (1988). apa APSFDB 0721-7250
- (1988) Appl. Phys. A: Solids Surf. , vol.45 , pp. 1
- Jones, K.S.¹ Prussin, S.² Weber, E.R.³

11
- 0042215876
- ipc IPHSAC 0305-2346
- D. J. Larkin, Inst. Phys. Conf. Ser. 142, 23 (1996). ipc IPHSAC 0305-2346
- (1996) Inst. Phys. Conf. Ser. , vol.142 , pp. 23
- Larkin, D.J.¹

12
- 0002538508
- jaJAPIAU 0021-8979
- G. Z. Pan, K. N. Tu, and A. Prussin, J. Appl. Phys. 81, 78 (1997). jap JAPIAU 0021-8979
- (1997) J. Appl. Phys. , vol.81 , pp. 78
- Pan, G.Z.¹ Tu, K.N.² Prussin, A.³

13
- 0001449442
- jaJAPIAU 0021-8979
- F. Cristiano, J. Grisolia, B. Colombeau, M. Omri, B. de Mauduit, A. Claverie, L. F. Giles, and N. E. B. Cowern, J. Appl. Phys. 87, 8420 (2000). jap JAPIAU 0021-8979
- (2000) J. Appl. Phys. , vol.87 , pp. 8420
- Cristiano, F.¹ Grisolia, J.² Colombeau, B.³ Omri, M.⁴ De Mauduit, B.⁵ Claverie, A.⁶ Giles, L.F.⁷ Cowern, N.E.B.⁸

14
- 0022675357
- pma PMAADG 0141-8610
- B. Burton and M. V. Speight, Philos. Mag. A 53, 385 (1986). pma PMAADG 0141-8610
- (1986) Philos. Mag. A , vol.53 , pp. 385
- Burton, B.¹ Speight, M.V.²

15
- 1642395023
- apl APPLAB 0003-6951
- S. T. Dunham, Appl. Phys. Lett. 63, 464 (1993). apl APPLAB 0003-6951
- (1993) Appl. Phys. Lett. , vol.63 , pp. 464
- Dunham, S.T.¹

16
- 84977244064
- jac JACTAW 0002-7820
- R. D. Carnahan, J. Am. Ceram. Soc. 51, 223 (1968). jac JACTAW 0002-7820
- (1968) J. Am. Ceram. Soc. , vol.51 , pp. 223
- Carnahan, R.D.¹

17
- 0001256655
- prb PRBMDO 0163-1829
- W. R. Lambrecht, B. Segall, M. Methfessel, and M. van Schilfgaarde, Phys. Rev. B 44, 3685 (1991). prb PRBMDO 0163-1829
- (1991) Phys. Rev. B , vol.44 , pp. 3685
- Lambrecht, W.R.¹ Segall, B.² Methfessel, M.³ Van Schilfgaarde, M.⁴

18
- 14344274586
- msf MSFOEP 0255-5476
- A. Mattausch, M. Bockstedte, and O. Pankratov, Mater. Sci. Forum 353-356, 323 (2001). msf MSFOEP 0255-5476
- (2001) Mater. Sci. Forum , vol.353-356 , pp. 323
- Mattausch, A.¹ Bockstedte, M.² Pankratov, O.³

19
- 0004144062
- Syokabo, Tokyo
- A. Ookawa, Crystal Growth (Syokabo, Tokyo, 1977), p. 107.
- (1977) Crystal Growth , pp. 107
- Ookawa, A.¹

20
- 84861450555
- In Ref. 19, 15
- In Ref. 19, p. 15.

21
- 0031702311
- msf MSFOEP 0255-5476
- E. Morvan, J. Monserrat, J. Rebollo, D. Flores, X. Jorda, M. L. Locatelli, and L. Ottaviani, Mater. Sci. Forum 264-268, 737 (1998). msf MSFOEP 0255-5476
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 737
- Morvan, E.¹ Monserrat, J.² Rebollo, J.³ Flores, D.⁴ Jorda, X.⁵ Locatelli, M.L.⁶ Ottaviani, L.⁷

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