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Volumn 237-239, Issue 1-4, 2002, Pages 1898-1903

Ordering and self-organized growth of Si in the Si/SiO2 superlattice system

Author keywords

A1. Crystal morphology; A1. Nanostructures; A1. Recrystallization A3. Superlattices; B2. Semiconducting silicon

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; CRYSTALLIZATION; HIGH TEMPERATURE EFFECTS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; QUANTUM THEORY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; SEMICONDUCTOR SUPERLATTICES; SILICA;

EID: 0036530434     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)02213-8     Document Type: Article
Times cited : (10)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.