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Volumn 237-239, Issue 1-4, 2002, Pages 1898-1903
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Ordering and self-organized growth of Si in the Si/SiO2 superlattice system
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Author keywords
A1. Crystal morphology; A1. Nanostructures; A1. Recrystallization A3. Superlattices; B2. Semiconducting silicon
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Indexed keywords
ANNEALING;
CRYSTAL ORIENTATION;
CRYSTALLIZATION;
HIGH TEMPERATURE EFFECTS;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
QUANTUM THEORY;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICES;
SEMICONDUCTOR SUPERLATTICES;
SILICA;
QUANTUM DEVICES;
CRYSTAL GROWTH;
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EID: 0036530434
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)02213-8 Document Type: Article |
Times cited : (10)
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References (22)
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