Photoluminescence in amorphous Si/SiO2 superlattices fabricated by magnetron sputtering

Applied Physics Letters

Volumn 69, Issue 21, 1996, Pages 3149-3151

  Sullivan, Brian T ^a   Lockwood, David J ^a   Labbé, Henri J ^a   Lu, Z H ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; ANNEALING; AUTOMATION; MAGNETRON SPUTTERING; OPACITY; PHOTOLUMINESCENCE; QUARTZ; SILICA;

LOW ANGLE X RAY REFLECTANCE MEASUREMENT; PERIODICITY; QUANTUM CONFINEMENT; WAVELENGTHS;

SEMICONDUCTOR SUPERLATTICES;

EID: 0030287498     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116811     Document Type: Article

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