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Volumn 149, Issue 3, 2002, Pages
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Effect of interfacial reactions on electrical properties of Ni contacts on lightly doped n-type 4H-SiC
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
CARRIER CONCENTRATION;
CURRENT VOLTAGE CHARACTERISTICS;
DIFFUSION;
ELECTRIC PROPERTIES;
EMISSION SPECTROSCOPY;
MICROSTRUCTURE;
NICKEL;
RAPID THERMAL ANNEALING;
SILICON CARBIDE;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
SCHOTTKY BARRIER HEIGHT;
SILICIDATION;
SYNCHROTRON RADIATION PHOTOEMISSION SPECTROSCOPY;
WIDE BANDGAP SEMICONDUCTOR;
INTERFACES (MATERIALS);
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EID: 0036503593
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1448504 Document Type: Article |
Times cited : (53)
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References (16)
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