Minimize emissions from semiconductor facilities

Chemical Engineering Progress

Volumn 96, Issue 5, 2000, Pages 35-41

  Mattrey, Joseph F ^c   Sherer, J Michael ^a   Miller, John D ^b  

^a ATMI EcoSys   (United States)

^b TEXAS INSTRUMENTS   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; AIR POLLUTION CONTROL; CONTAMINATION; ENVIRONMENTAL PROTECTION; FACILITIES; GAS EMISSIONS; HEALTH CARE; MICROELECTRONICS; REGULATORY COMPLIANCE; SEMICONDUCTOR DEVICE MANUFACTURE;

AIR FLOW RATE; CENTRALIZED AIR ABATEMENT SYSTEM; EMISSION CONTROL SYSTEM; EXHAUST CONDITIONER;

INDUSTRIAL EMISSIONS;

EID: 0033729858     PISSN: 03607275     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (1)

1. Sherer, J. M. "Point of Used (POU) Control Systems for Semiconductors p;:;iÄIEÄÄl!Ä? ™ :-l%ylili|i*:i:::;lPpÄÄ;:* s: öeÄ :teJ:*;#*P-pP?Ca|l*' •>*: fc BS5a 1|*feÄ|| ÄSÄ öiö-ö sÄ #§?tÄ>p-A-:-l£|U a¥ai:lïp5î s* ï:-fs WM Wss *fe *': ft?ïJS*:*:-•V mtï.*ûbx$Mi*tf<>i;i*xî*b-' : SSfSuSSsfeiOS* - *'*-