A new way to treat process exhaust to remove CF4

Semiconductor International

Volumn 20, Issue 10, 1997, Pages 95-100

  Van Compel, Joe ^a   Walling, Tom ^b  

^a Edwards High Vacuum International   (United States)

^b MOTOROLA INC   (United States)

Author keywords

Gas scrubbers; PFC abatement; Process exhaust treatment

Indexed keywords

AIR POLLUTION CONTROL; AIR QUALITY; CARBON DIOXIDE; COMBUSTION; COMBUSTORS; EXHAUST GASES; FUEL BURNERS; GAS EMISSIONS; GLOBAL WARMING; LAWS AND LEGISLATION; SCRUBBERS; SEMICONDUCTOR DEVICE MANUFACTURE;

DESTRUCTION REMOVAL EFFICIENCY; GAS SCRUBBERS; PERFLUORINATED COMPOUND ABATEMENT; PROCESS EXHAUST TREATMENT;

FLUORINE COMPOUNDS;

EID: 0031235950     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. This study is described in the SEMATECH Technology Transfer 97073319A-TR.
2. E.A. Dutrow, "Partnership with the Semiconductor Industry for Reduction of PFC Emissions," Proceedings, Semicon Southwest, 1996, p. 137.
3. Ceramic matrix technology is supplied by Alzeta Corp., Santa Clara, Calif.
4. SEMATECH Technology Transfer 95113010B.ENG.