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Volumn 33, Issue 2, 2002, Pages 92-95

Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering

Author keywords

Roughness analysis; Scanning force microscopy; Surface measurements; Surface quality; Thin films; White light interferometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; FRICTION; GOLD; INTERFEROMETRY; LIGHT SCATTERING; MICROSTRUCTURE; ROUGHNESS MEASUREMENT; SURFACE PROPERTIES; SURFACE TENSION; THIN FILMS; TITANIUM NITRIDE; WETTING;

EID: 0036472231     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1169     Document Type: Article
Times cited : (10)

References (23)
  • 20
    • 0008519801 scopus 로고    scopus 로고
    • Elastic light scattering by thin films, spectroscopic measurements and analysis
    • PhD Dissertation. Acta Universitatis Upsaliensis: Uppsala
    • (1996)
    • Rönnow, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.