|
Volumn 33, Issue 2, 2002, Pages 92-95
|
Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
|
Author keywords
Roughness analysis; Scanning force microscopy; Surface measurements; Surface quality; Thin films; White light interferometry
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
FRICTION;
GOLD;
INTERFEROMETRY;
LIGHT SCATTERING;
MICROSTRUCTURE;
ROUGHNESS MEASUREMENT;
SURFACE PROPERTIES;
SURFACE TENSION;
THIN FILMS;
TITANIUM NITRIDE;
WETTING;
FRICTION COEFFICIENT;
MICROROUGHNESS ANALYSIS;
POWER SPECTRAL DENSITY;
SCANNING PROBE MICROSCOPY;
SURFACE MICROSTRUCTURE;
WETTING ANGLE;
SURFACE ROUGHNESS;
|
EID: 0036472231
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1169 Document Type: Article |
Times cited : (10)
|
References (23)
|