Combination of surface characterization techniques for investigating optical thin-film components

Applied Optics

Volumn 35, Issue 25, 1996, Pages 5052-5058

  Duparré, Angela ^a   Jakobs, Stefan ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Atomic force microscopy; Light scattering; Surface roughness; Thin film microstructure

Indexed keywords

EID: 0000112017     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005052     Document Type: Article

References (18)

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