Measurement and analysis of microtopography using wavelet methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3098, Issue , 1997, Pages 133-143

  Recknagel, Rolf Jürgen ^a   Notni, Gunther ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

fractal; roughness; surface; wavelet transform; white light interferometry

Indexed keywords

FRACTAL DESCRIPTION; FRACTAL PARAMETERS; HAUSDORFF; MEASUREMENT AND ANALYSIS; MICRO AND MACRO; MICRO TOPOGRAPHY; ROUGHNESS; SHARP EDGES; SUB-NYQUIST SAMPLING; WAVELET METHODS; WHITE LIGHT; WHITE-LIGHT INTERFEROMETRY;

COMPUTER SIMULATION; FRACTAL DIMENSION; INTERFEROMETRY; OPTICAL TESTING; POWER SPECTRAL DENSITY; SURFACE ROUGHNESS;

WAVELET TRANSFORMS;

EID: 0343584480     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281153     Document Type: Conference Paper

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