Two-dimensional G-MEEF theory and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4754, Issue , 2002, Pages 146-155

  Granik, Yuri ^a   Cobb, Nick ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

G MEEF; Mask error enhancement factor; Mask error factor; MEEF; MEF; OPC

Indexed keywords

ALGORITHMS; ITERATIVE METHODS; MATRIX ALGEBRA; PERTURBATION TECHNIQUES; SILICON WAFERS;

MASK ERROR FACTOR;

MASKS;

EID: 0036456467     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476941     Document Type: Conference Paper

References (9)

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9. B.W. Smith, J.F. Chen, "OPC and image optimization using localized frequency analysis", Proc. SPIE Vol. 4691, 2002.