Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 3, Issue 3-4, 2002, Pages 499-502

  Ding, Jian Ning ^a   Yang, Ji Chang ^a   Cai, Lan ^a   Wen, Shi Zhu ^b  

^a JIANGSU UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Fracture; Mechanical properties; Polysilicon; Surface roughness

Indexed keywords

EID: 0036323166     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2002.3.3-4.499     Document Type: Article

References (8)

1. Wen, S.Z., Ding, J.N. Study on the fundamental design issues of microelectromechanical systems, Chinese, J. Mech. Eng., 36(2000)39 - 42
2. Ding, J.N., Meng, Y.G., Wen, S.Z. Size effect on the mechanical properties of microfabricated polysilicon thin films, J.Mater. Res., 16(2001)2223 - 2228
3. Ding, J.N., Meng, Y.G., Wen, S.Z. Specimen size effect on mechanical properties of polysilicon microcantilever beams by deflection using nanoindentation, Materials Science and Engineering B, 83(2001)42 - 47
4. Schweitz, J.Å., Ericson, F. Evaluation of mechanical materials properties by means of surface micromachined structures, Sensors and Actuators, A74(1999)126 - 133
5. Lee, S., Cho, C.H., Kim, J. The effects of post-deposition processes on polysilicon Young's modulus, J. Micromech. Microeng., 8(1998)330-337
6. Jayaraman, S., Edwards, R.L., Hemker, K.J. Relating mechanical testing and microstructural features of polysilicon thin films, J. Mater. Res., 14(1999)688 - 697
7. Koskinen, J., Steiwall, J.E., Soave, R., Johnson, H.H. Microtensile testing of free-standing polysilicon fibers of various grain sizes, J. Micromech. Microeng., 3(1993)13 -17
8. Wilson, C.J., Beck, P.A. Fracture testing of bulk silicon microcantilever beams subjected to a side load, Journal of microelectromechanical systems, 5(1996)142 - 150