Signal components in the environmental scanning electron microscope

Journal of Microscopy

Volumn 196, Issue 1, 1999, Pages 26-34

  Fletcher, A L ^a   Thiel, B L ^a   Donald, A M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Environmental scanning electron microscopy; Imaging gases; Secondary electrons

Indexed keywords

BACKSCATTERING; ELECTRONS; GASES; IONIZATION OF GASES; SECONDARY EMISSION;

BACKSCATTER COEFFICIENTS; BACKSCATTERED ELECTRONS; ELECTRON SIGNALS; ENVIRONMENTAL SCANNING; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPES; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; IMAGING GAS; SECONDARY ELECTRONS; SECONDARY EMISSION COEFFICIENTS; SIGNAL COMPONENTS;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; ELECTRON; IMAGE ENHANCEMENT; IMAGE PROCESSING; IMAGE QUALITY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SIGNAL PROCESSING;

EID: 0032881223     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1999.00590.x     Document Type: Article

References (17)

1. Bruining, H. (1954). Physics and Applications of Secondary Electron Emmission. Pergamon Press, London.
2. Danilatos, G.D. (1988) Foundations of environmental scanning electron microscopy. Adv. Electron. Electron Phys. 71, 109-250.
3. Danilatos, G.D. (1990) Theory of the gaseous detector device in the environmental scanning electron microscope. Adv. Electron. Electron Phys. 78, 1-102.
4. Durkin, R. & Shah, J.S. (1993) Amplification and noise in high pressure scanning electron microscopy. J. Microsc. 169, 33-51.
5. von Engel, A. (1965). Ionized Gases. Clarendon Press, Oxford.
6. Fletcher, A.L., Thiel, B.L. & Donald, A.M. (1997) Amplification measurements of potential imaging gases in environmental SEM. J. Phys. D: Appl. Phys. 30, 2249-2257.
7. Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Romig, A.D., Jr, Lyman, C.E., Fiori, C. & Lifshin, E. (1992). Scanning Electron Microscopy and X-Ray Microanalysis. Plenum, New York.
8. Hwang, H., Kim, Y.K. & Rudd, M.E. (1996) New model for electron-impact ionization cross-sections of molecules. J. Chem. Phys. 104, 2956-2966.
9. Kittel, C. (1986) Introduction to Solid State Physics (6th edn.). Wiley, New York.
10. Loeb, L.B. (1961). Basic Processes of Gaseous Electronics. University of California Press, Berkeley, CA.
11. Massey, H.S.W. & Burhop, E.H.S. (1969). Electronic and Ionic Impact Phenomena. Clarendon Press, Oxford.
12. Meck, J.M. & Craggs, J.D. (1978). Electrical Breakdown of Gases. John Wiley & Sons, New York.
13. Meredith, P., Donald, A.M. & Thiel, B.L. (1996) Electron-gas interaetions in the environmenlal SEM's gaseous detector. Scanning, 18, 467-473.
14. Moncrieff, D.A., Robinson, V.N.E. & Harris, L.B. (1978) Charge neutralisation of insulating surfaces in the SEM by gas ionisation. J. Phys. D: Appl. Phys. 11, 2315-2325.
15. Ono, S. & Kanaya, K. (1979) The energy dependence of secondary electron emission based on the range-energy retardation formula. J. Phys. D: Appl. Phys. 12, 619-632.
16. Seiler, H. (1983) Secondary electron emission in the scanning electron microscope. J. Appl. Phys. 54, R1-R18.
17. Thiel, B.L., Bache, I.C., Fletcher, A.L., Meredith, P. & Donald, A.M. (1997) An improved model for gas amplification in the environmental SEM. J. Microsc. 187, 143-157.